Temperature Rise in a Birefringent Substrate by RF Discharge Plasma

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چکیده

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ژورنال

عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials

سال: 1997

ISSN: 0385-4205,1347-5533

DOI: 10.1541/ieejfms1990.117.11_1077